http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130025012-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d69a2c8c8390e8abc2d4b3e009e33c7b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32798 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2011-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52d0a26351f776c119ade5a07a2af903 |
| publicationDate | 2013-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130025012-A |
| titleOfInvention | Substrate Processing System Having Plasma Generator for Exhaust Gas Purification |
| abstract | The present invention relates to a substrate processing system, comprising: a process chamber for processing a substrate using plasma; An exhaust part for exhausting exhaust gas after substrate processing of the process chamber, the exhaust part being connected to the process chamber and having an exhaust gas discharged; An exhaust pump for discharging the exhaust gas through the exhaust pipe; It is characterized in that it comprises a plasma generating unit for purifying the exhaust gas is coupled to the exhaust pipe to generate a plasma. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200009659-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170028289-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101383985-B1 |
| priorityDate | 2011-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.