| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f94790cf5bf17ef5799ba79a953aa57 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2019-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0741fe2175cc35526506a790c9ba6ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d4ae4bcf00352058355baa5ab897044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45cdddb400bee50bc189d69a993bbcf7 |
| publicationDate |
2020-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200003760-A |
| titleOfInvention |
Method for Forming Thin Film |
| abstract |
The present invention includes the steps of sequentially spraying a source gas, a first purge gas, a reaction gas reacting with the source gas, and a second purge gas on the substrate to form a single atomic layer thin film; Removing impurities of the single atomic layer thin film through plasma treatment to successively remove impurities of the single atomic layer thin film after forming the single atomic layer thin film; And forming a complete thin film on the substrate by repeatedly performing a single cycle in which the forming of the single atomic layer thin film and the removing of the impurities of the single atomic layer thin film are performed continuously. will be. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022260476-A1 |
| priorityDate |
2017-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |