abstract |
[PROBLEMS] To provide a salt capable of producing a resist pattern with excellent line edge roughness. [Solution] A salt represented by formula (I). In formula (I), R 1 represents-(X 1 -O) o -R 5 . o represents any integer of 0-6. R < 5> represents a C1-C12 hydrocarbon group. X < 1> represents a C2-C12 bivalent hydrocarbon group. R < 2> represents a C1-C12 alkyl group etc. l represents any integer of 0-3. When l is 2 or more, some R < 2> may mutually be same or different. R 3 and R 4 each independently represent a hydrogen atom or the like. m and n represent 1 or 2 each independently. X 0 represents a single bond, -CH 2- , -O-, or -S-. R 6 and R 7 each independently represent an alkyl group having 1 to 4 carbon atoms and the like having a fluorine atom.] |