http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190134536-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-1452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2601-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D327-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D215-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C63-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D279-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D519-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-02
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
filingDate 2019-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96dfb78fde169d67126a2f36ad187e54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b407ce24c25aac286c10a2e26b32a888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_234f320334f9a97fe9e39a3fe7148a86
publicationDate 2019-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20190134536-A
titleOfInvention Onium salt, chemically amplified positive resist composition, and resist pattern forming process
abstract Onium salts of arerensulfonic acids with crosslinked ring containing groups yield bulky acids with adequate strength and controlled diffusivity. When a positive resist composition comprising an onium salt and a base polymer is processed by lithography, a pattern of spherical profiles with high resolution and low LER is formed.
priorityDate 2018-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009053518-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011022564-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016200805-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012125009-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6651965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010100604-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016065016-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5083528-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75821
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3782034
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID223
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415863310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12041
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID59594123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452861895
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453678106
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393647
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12757
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420025039
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457311044
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24509
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3010347
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422636095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412216270
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415790169
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410486797
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18319459
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21889507
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413552233
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10908
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20591511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569655
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13230
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16263
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474224
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419572063
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416157759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423459940
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6380
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449387974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87177141
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712472
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415710466
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394324
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID185716
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421208046
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2734849
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410023599
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393749
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID114576
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394829
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448575479
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15789245
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453214680
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415868624
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4379756
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456357891
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14085
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456366051
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61343
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412095679
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4694097
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393337
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425829127
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422089649
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62453
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413957613
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID171378
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457814461
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454973655
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559564
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57599495
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422220961
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422094432
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410586060
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3715291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458427722
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75763
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12507
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID402
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22725
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418460264
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID102846
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15287
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458391465
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3724478
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456500829
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID118976672
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420768023
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411402389
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID118976674
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393641
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69415269
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559526
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424435408
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419509562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12877
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457444288
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456001950
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419568772
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150712577
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420207534
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID468172510
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408496367
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448045709
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415808241
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID151888398
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415757774
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCQ29078
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546884
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422975274
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456464034
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23135758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421164088
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88561
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91537
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19710
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417064530
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456475560
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454496526
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7937
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86738798
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424354469
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID429685100
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393376
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419565472
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1385867
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456466732
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421348734
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411272810
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393375
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54180450
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415816504
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21939674
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140770684
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521657
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID428146536

Total number of triples: 199.