http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190087749-A

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filingDate 2018-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_192f315a0e24a109730f41fe3db3ae4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8691d31da71f1064f0140f8889db51f
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publicationDate 2019-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20190087749-A
titleOfInvention Composition for hard mask
abstract The present invention provides a composition for a hard mask, comprising a polymer of a specific formula and a solvent. A hard mask having improved etchability, solubility, and flatness at the same time from the composition for a hard mask can be formed.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102148772-B1
priorityDate 2018-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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