http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190076516-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-11
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5384
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14636
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-538
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-498
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-485
filingDate 2017-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e023a2526af21ce4f7d0cf251557c3cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f2b6cf3f394f465de064bdb9ee0c3b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecd9ee45051dfa99d9c7699d837ec257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a733d1b11b8cd652889332327386e0cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e49b311c9703d98ac920ada1f4ca6cbf
publicationDate 2019-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20190076516-A
titleOfInvention Semiconductor Device having a Structure for Insulating Layer under Metal Line
abstract A via plug formed in the substrate; And a metal layer for wiring formed at an end of the via plug, wherein an insulating structure is disposed under the metal layer for wiring, wherein the insulating structure has a different layered structure depending on a positional relationship with the metal layer for wiring, .
priorityDate 2017-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140041970-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017005054-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415776239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82895

Total number of triples: 32.