http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180132880-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ef01e33058cf740cf2197991be97af1
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-40
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D201-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D201-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-40
filingDate 2017-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51c536c831d3ec6631a2907252d4cd3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_286afc47b0af846ee9155af7018bf9c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88f39a900ee164c07ccd777a993771f5
publicationDate 2018-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20180132880-A
titleOfInvention A composition for forming a metal-containing film, a method for manufacturing a composition for forming a metal-containing film, a semiconductor device,
abstract (A1) having a cationic functional group containing at least one of a primary nitrogen atom and a secondary nitrogen atom, and a compound (a2) having a nitrogen atom other than the compound (a1) A compound (B) which is at least one selected from the group consisting of a compound (A), a compound (b1) having at least one of a germanium atom, a tin atom, a selenium atom and a zirconium atom and a carboxy group, ). &Lt; / RTI &gt;
priorityDate 2016-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013079374-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014207142-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415904629
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409064954
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6326970
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15180804
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19879581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82136
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394904
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515750
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10422
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414882137
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135408770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9860271
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414881653
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID266034
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17960152
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7514
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414877077
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7064
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415913271
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53427353
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66688681
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76394
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417814373
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415870042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410410203
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11097560
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421922235
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413995422
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23995
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430234935
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11138
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID152200920
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415769340
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397394
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123514518
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415759953
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327710
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15772
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22253200
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418109356
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523138
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414933593
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421922260
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78772
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76482
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID151975904
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412833275
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419574678
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420618656
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10679
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7071
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416226496
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID77125
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523132
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524875
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410442097
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21314405
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID151344438
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524915
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422924767
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8452
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559218
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7809
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414879359
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415858512
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419064420
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID252253
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID190289
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31422
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20320837
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68315
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11344952
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140265409
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15840397
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474475
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22184044
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7579
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409010033
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456411915
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66537
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421802839
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15314
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79742
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9839431
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140946910
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17352
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421800085
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87575
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8113
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415759664
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62322
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140265407
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537837
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140265408
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID162066
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418563989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414806167
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419514597
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423010993
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457444288
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550106
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421005978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419564877
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90231917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419842112
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397365
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419851834
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559021
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66082
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419475434
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409801425
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420379954
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID110752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424384725
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5352426
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID432288547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415854273
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415757342
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415770067
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419743418
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513432
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7656
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447672176
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6847
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12251
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431821554
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412808433
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410490416
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8706
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8119
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418830532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415394125
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413416973
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424985669
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409440120
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12416330
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517663
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457834384
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12301
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17593
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549422
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1018
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17181
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419584148
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414811179
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID428913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456413165
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456413267
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3040611
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512807
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420491400
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75592
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415775112
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559456
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID152913
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140199189
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57371143
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426176625
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6377
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID73919
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83030
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420953987
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID80083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415717922
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6326954
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422500770

Total number of triples: 211.