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publicationDate 2018-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20180122036-A
titleOfInvention Control of Dry Etching Process Properties Using Waferless Dry Cleaning Optical Emission Spectroscopy
abstract An architecture for obtaining a light emission spectrum from a light emission spectroscopy system by flowing a dry cleaning gas into a plasma processing chamber of a plasma processing system and igniting a plasma in a plasma processing chamber to initiate a waferless dry cleaning process, And a method are described.
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