| abstract |
A semiconductor film, a plate member, and a semiconductor device, in which semiconductor characteristics, particularly leakage current, are suppressed and pressure resistance and heat dissipation are excellent, are provided. 1. A crystalline semiconductor film comprising, as a main component, a crystalline semiconductor film containing an oxide semiconductor having a co-random structure as a main component, particularly a component of a semiconductor among one or more oxides selected from gallium, indium and aluminum, A crystalline semiconductor film or a plate-like body having a thickness of 1 占 퐉 or more; and a semiconductor structure comprising the crystalline semiconductor film or the plate-like body. |