| abstract |
The present invention relates to a ta-C composite coating layer doped with tin or germanium, an apparatus for manufacturing the ta-C composite coating layer, and a method for manufacturing a ta-C composite coating layer using the apparatus. More specifically, it relates to a ta-C composite coating layer doped with tin or germanium capable of bonding with carbon and having an atomic radius larger than that of carbon and capable of reducing residual stress, and a method of manufacturing the ta-C composite coating layer by a vacuum filtration arc method And a ta-C composite coating layer production apparatus. Therefore, the present invention is characterized in that the mechanical properties of the ta-C composite coating layer are maintained, the residual stress is reduced, and the thickness of the composite coating layer is improved. |