| abstract |
The present invention relates to a vacuum treatment unit and a vacuum treatment process for performing a plasma process, wherein the treatment can be electrically connected to the cathode via a cathode 10 and an arc generator. A device for producing an electrical low voltage arc discharge 15 (LVAD) comprising an anode 13 and a workpiece support for receiving and moving the workpieces 2, which may be electrically connected to the bias generator 16. support 7) and one or more feed lines 8 for inert and / or active gases are performed in the vacuum chamber 1. Here, at least a part of the surface of the anode is made of graphite and operated at high temperature.n n n n Low Voltage Arc Discharge, Graphite, Bias Generators, Workpieces, Vacuum Processing Equipment |