abstract |
A polymer containing a structural unit represented by the formula (1), a monomer represented by the formula (3), an organic film composition comprising a solvent, and a pattern forming method using the organic film composition. [Chemical Formula 1] (3) The definition of A, B, A 0 , A 1 , A 2 , L 1 , L 2 , L 3 , L 4 , X 1 , X 2 , X 3 , X 4 , Lt; / RTI > |