| abstract |
An abrasive for chemically mechanically polishing a carbonaceous material having a carbon content of 60 to 95 atm% measured by X-ray photoelectron spectroscopy and a gas having an insulating material to remove at least a part of the carbonaceous material, An allylamine-based polymer and water, wherein the mass ratio of the content of the allylamine-based polymer to the content of the abrasive grains is 0.002 to 0.400, the abrasive has a positive charge in the abrasive, abrasive. |