| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5351c62aee4203f2be2944f21a6def2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2016-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0576045429c159f1632b980a372b35b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1d4ee5fac741bdd94e9feaa4074c0ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_395f742b87ab7256d2d7c12f1f952e2f |
| publicationDate |
2018-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180008994-A |
| titleOfInvention |
Apparatus and method of fabricating semiconductor device using two-dimensional nano materials |
| abstract |
The present invention relates to an apparatus for manufacturing a semiconductor device for processing a two-dimensional nanomaterial. According to an embodiment of the present invention, there is provided a control module for determining a variable frequency corresponding to a selected plasma process among a plurality of plasma-treatments for changing at least one of characteristics of a two-dimensional nanomaterial; A power supply module for supplying power having the variable frequency according to the control of the control module; And a plasma processing module for changing characteristics of the two-dimensional nanomaterial by a plasma generated according to electric power having the variable frequency. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220144540-A |
| priorityDate |
2016-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |