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filingDate 2015-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4865e05ed279a84bb2422878b7e1b1dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68dee2e39838fe96ee1041a83cfd2a2c
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publicationDate 2017-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20170059170-A
titleOfInvention Etching solution composition for a silicon nitride layer
abstract The present invention relates to a silicon nitride film etchant composition containing phosphoric acid, a non-fluorine-containing inorganic acid except for phosphoric acid, a silicon-based compound and water, and has an effect of suppressing etching of a silicon oxide film and selectively etching only a silicon nitride film.
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