abstract |
The sintered body of the present invention includes oxyfluoride of yttrium. That the oxyfluoride of YOF of yttrium and / or Y 5 O 4 F 7 is preferred. The sintered body of the present invention preferably contains 50% by mass or more of oxyfluoride of yttrium. The sintered body of the present invention preferably has a relative density of 70% or more, and an open porosity of 10% or less. It is also preferable that the sintered body of the present invention has a three-point bending strength of 10 MPa or more and 300 MPa or less. |