| abstract |
(A), a radiation-sensitive compound (B), and a crosslinking agent (C) represented by the following general formula (1), wherein the content of the crosslinking agent (C) relative to 100 parts by weight of the binder resin And 3 to 25 parts by weight of the radiation-sensitive resin composition. (In the general formula (1), R 1 to R 3 each independently represent a hydrocarbon group of 1 to 10 carbon atoms.) |