Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-3324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-418 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02107 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-00 |
filingDate |
2010-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6aa05c90c32bdd74a6102c9f447da5d |
publicationDate |
2012-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20120082412-A |
titleOfInvention |
Semiconductor element substrate |
abstract |
Radiation-sensitive composition containing the polymer, crosslinking agent, and radiation sensitive compound which has a unit of the cyclic imide skeleton which has a substituent of a specific structure at a nitrogen atom, and the monomer which has a structure in which a cyclic olefin shares one carbon-carbon bond. A semiconductor element substrate having a resin film made of a resin composition, wherein the resin film is formed in contact with the surface of the semiconductor element mounted on the semiconductor element substrate or the semiconductor layer included in the semiconductor element. To provide. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160148548-A |
priorityDate |
2009-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |