| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate |
2015-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88640cfb3296544c53b9750addaaa7df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1679d14c2ba53a36c959b91778255d2e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcfaa5d311cd7a24a899b9b6185f7afe |
| publicationDate |
2016-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160109569-A |
| titleOfInvention |
Etchant composition and manufacturing method of an array for liquid crystal display |
| abstract |
The present invention relates to an etching liquid composition and a method of manufacturing an array substrate for a liquid crystal display. The etchant composition of the present invention is characterized in that the catalytic effect is caused by the inclusion of a noble metal compound. Accordingly, the amorphous silicon layer and the amorphous silicon layer, which have been etched through the conventional dry process, are subjected to a wet etching process, There is an advantage to be able to do. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018070837-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220126964-A |
| priorityDate |
2015-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |