Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-582 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
filingDate |
2015-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8691d31da71f1064f0140f8889db51f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15b48317f3d8bc31d43930453e474b48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ede42355135933e4860e6289325722ac |
publicationDate |
2016-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20160107951-A |
titleOfInvention |
Chemically amplified photosensitive resist composition and insulation layer prepared from the same |
abstract |
(A-1) a resin in which at least a part of a phenolic hydroxyl group or a carboxyl group is protected with an acid-decomposable group, (a-2) a resin in which at least a part of the phenolic hydroxyl group or carboxyl group is protected with an acid decomposable group, (A) a binder resin comprising an acrylic resin containing an epoxy group and (a-3) an acrylic resin containing an oxetane group; (B) a photoacid generator; And (C) a solvent to obtain an insulating film excellent in developability and having improved sensitivity, pattern transmittance and slope and securing stability over time, and an insulating film made therefrom will be. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11042089-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190031162-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019054805-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200099864-A |
priorityDate |
2015-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |