| abstract |
The present invention relates to novel, soluble, multi-ligand-substituted metal oxide compounds for forming metal oxide films with improved stability, as well as compositions made therefrom and methods of use thereof. Specifically, the present invention relates to compounds having the following structural formula (I): < EMI ID = Wherein at least one of R 1 , R 2 , R 3 and R 4 is i) and at least one of R 1 , R 2 , R 3 and R 4 is selected from the group consisting of ii ), Wherein i) is a silicon-containing organic moiety having two or more carbons and ii) is an organic moiety. The present invention also relates to a spin-coatable composition of a compound of formula (I) dissolved in a solvent. The present invention further relates to a process for forming a coating on a patterned substrate using such a spin-coatable composition. |