abstract |
The present application relates to a method of manufacturing a patterned substrate. The method may be used in the manufacture of devices such as, for example, electronic devices and integrated circuits or in other applications such as integrated optical systems, guidance and detection patterns of magnetic domain memories, flat panel displays, liquid crystal displays (LCDs) Organic light emitting diodes, and the like, and may be patterned on the surface for use in the manufacture of discrete track media such as integrated circuits, bit-patterned media, and / or magnetic storage devices such as hard drives, Can be used to build. |