| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0011 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04 |
| filingDate |
2014-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a8847743cf94b49f87d402f5e1b1ec6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a594693701bfd24c133b326e1e5bbc95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7fd37c70898e7a6b6b26b0a27d3dced
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51f1e9f60db10576547691078b4d37a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb2da4041e2f358a23f62df3f017d401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_828e852f92f1affe185e36b033461823
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ceb22811d0d9a50e9d953b28ee6f1457
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a493b9d9fc3bdfb52a5be5c14193ac9a |
| publicationDate |
2016-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160027197-A |
| titleOfInvention |
Deposition device, deposition method, and method for producing organic electroluminescent element |
| abstract |
The present invention provides a vapor deposition apparatus and a vapor deposition method capable of forming a thin film pattern with high precision, and a manufacturing method of an organic electroluminescence display apparatus having excellent display quality. According to the present invention, there is provided a deposition apparatus capable of using a scan evaporation method, wherein the limiting member includes a first plate portion, a second plate portion provided with a gap between the first plate portion and a connection portion connecting the first plate portion to the second plate portion, Wherein an opening is formed in the first plate portion and an opening opposed to the opening of the first plate portion is formed in the second plate portion and a first space is formed between the opening of the first plate portion and the opening of the second plate portion And a second space exists between the first plate portion and the second plate portion beside the first space in a direction orthogonal to the normal direction of the substrate and the scanning direction of the substrate and the first space is connected to the second space And a third space exists outside the confining member on the side of the second space in the scanning direction of the substrate, and the second space is connected to the third space. |
| priorityDate |
2013-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |