| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7847
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0669
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 |
| filingDate |
2015-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25bbfb8c0b2a5cca598af3c89eef52e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ba64b6b60b3b17e48f509292c2c7733
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_748f7f35a80ac5a49a6fc3daf9774ed6 |
| publicationDate |
2015-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150142632-A |
| titleOfInvention |
Crystalline multiple-nanosheet strained channel fets and methods of fabricating the same |
| abstract |
A field effect transistor and a method of manufacturing the same are provided. The field effect transistor includes a strained crystalline semiconductor channel region and a body layer having a gate stack on the channel region. The gate stack includes a crystalline gate dielectric layer between the channel region and a lattice mismatched crystalline semiconductor gate layer and between the gate layer and the channel region. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180056362-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11393926-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180044794-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102183131-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180113118-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11145762-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160068680-A |
| priorityDate |
2014-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |