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filingDate 2014-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e07fe989e664d09800870cc47d8977f0
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publicationDate 2015-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20150127145-A
titleOfInvention Chamber component with protective coating suitable for protection against fluorine plasma
abstract Embodiments described herein relate to a protective coating that protects underlying chamber components from corrosion or deterioration in a corrosive environment. The chamber component has a surface comprising a ceramic material. The coating disposed on the surface includes magnesium oxide, lanthanum oxide, or lanthanum fluoride.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022231190-A1
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