http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150079455-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-101
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D201-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D201-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L101-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-10
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
filingDate 2014-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_889a9e41502159f698200607be9c5c1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a103399105aed76cca56947ee42834dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b8a0e497645e7ba6d7f516a99e8db4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be835a103388ce1c8816005f37adda0b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc9a29ba90b9f3443d76acddd56968c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_802d961e267cab2ff5c3f5972b78b315
publicationDate 2015-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20150079455-A
titleOfInvention Topcoat compositions and photolithographic methods
abstract A topcoat composition is provided which can be used in immersion lithography to form a photoresist pattern. The topcoat composition comprises: 1) a first organic solvent represented by the following formula (I); And 2) a second organic solvent selected from C4 to C10 monohydric alcohols: In this formula, R 1 and R 2 are alkyl groups having 3 to 8 carbon atoms, and the total carbon number of R 1 and R 2 exceeds 6.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190082664-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200002703-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190082662-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180048339-A
priorityDate 2013-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009286087-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080056177-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090050021-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009136878-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66984
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416000539
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419571676
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872351
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420549279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415783499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410489073
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19163
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547515
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87598
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559429
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419707315
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415720672
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559397
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872352
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512444
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415755888
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11448
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456499112
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448795455
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87087495
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872467
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422800637
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419552240
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456997917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409763663
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410491876
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71443878
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548823
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID118498010
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407219005
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID537697
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414885245
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123334
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467690315
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430854851
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452875120
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512377
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415736402
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410490365
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11001803
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12331
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID35139
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12296
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420171292
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11175590
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419533157
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415901393
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11024549
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7910
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513585
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61914
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20493894
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75024
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419706947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520428
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67328
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409500530
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549779
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8723
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8902
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539241
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID432067332
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426079441
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421295590
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID517970
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID637758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419881567
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135495951
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7795
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488561
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421264556
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7983
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15458
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25137
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11814213
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454413993
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7351
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11124
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420257518
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID247453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21983220
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID428412099
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449385151
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID522214
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID143345
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22597223
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID561663
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138419
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420927840
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416011437
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15333521
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12613
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415839233

Total number of triples: 149.