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publicationDate 2015-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20150074178-A
titleOfInvention Methods for depositing fluorine/carbon-free conformal tungsten
abstract Methods of atomic layer deposition are provided for depositing a tungsten film or a tungsten-containing film using a tungsten-containing reaction gas comprising at least one of tungsten pentacloride having the empirical formula WCl 5 , or WCl 6 .
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