| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2fadcae3196ca725b795713aa49cd9f1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2883-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2909-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2009-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2059-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2031-756 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-56 |
| filingDate |
2013-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5289a057f8d096312992fb53d9282632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbd77a1b28da6b3b0e6a4932688f45bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c822e848caad3c63789085408f7d9d9 |
| publicationDate |
2014-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140127842-A |
| titleOfInvention |
Method of surface tension control to reduce trapped gas bubbles |
| abstract |
Embodiments of the present invention include methods for varying the chemical form of the interface surface of the imprint template and substrate to vary the surface tension, differentiating the interfacial surface tension to control the interfacial flow rate of the pre-cured liquid resist, And adjusting the pre-cured liquid resist interfacial flow rate to prevent entrapped gas bubble defects in the cured imprinted resist. ≪ Desc / Clms Page number 2 > |
| priorityDate |
2012-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |