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filingDate 2001-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_083d70ad3ebfcc83c6e82a0c89f672fa
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publicationDate 2002-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20020066051-A
titleOfInvention Complex Metal Film Formation on Polymer Resin Surface by ECR Coating Technology at Ambient Temperature
abstract The present invention forms a high-density, high-energy plasma ion with a reactive gas or an inert gas introduced using ECR (Electron Cyclotron Resonance) to apply negative high DC voltage or high frequency pulse voltage of about 0.05 to 50 kV Physical and chemical vapor deposition on the sample surface in the vacuum chamber to form a single metal and a composite metal film. As a result, the surface properties of the target polymer resin are changed to electron conductivity in the range of 10 0 to 10 8 Ω · cm, preventing ESD and shielding electromagnetic waves. It relates to a method of surface modification according to the polymer resin product characteristics.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140127842-A
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type http://data.epo.org/linked-data/def/patent/Publication

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