| abstract |
Disclosed is a spacer having excellent balance between compressive strength and restoring force, or a radiation sensitive resin composition with high sensitivity and high resolution, which imparts an interlayer insulating film excellent in transparency, light resistance and voltage conservation. (A1) a structural unit having a carboxyl group, (A2) a structural unit having at least one member selected from the group consisting of an oxiranyl group and an oxetanyl group, and (A3) a structural unit having a specific siloxane structural unit , [B] a polymerizable unsaturated compound, [C] a radiation-sensitive polymerization initiator, and [D] a siloxane compound having a specific polymerizable unsaturated bond. |