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filingDate 2013-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2014-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20140107602-A
titleOfInvention Etching method and etching liquid used therein
abstract Applying a fluorine ion, a nitrogen-containing compound having two or more nitrogen-containing structural units, and an etchant containing water and adjusted to a pH of 5 or less to the substrate; And etching the titanium compound in the substrate.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102014118508-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160094640-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170011593-A
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