http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140089457-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3164a963ca21cec1151213cb1bb95e77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_985f1bf0df4204078e687f8417dc5871 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2013-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c1ee46be89fda6f69e37ecb304ee995 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c21d540b6fb6091ee77b44c405a7fac1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c57207ec64ff424ee6affe9b1519e157 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c61e6e30a0cb1f633b6ffbca6f186e17 |
| publicationDate | 2014-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140089457-A |
| titleOfInvention | Plasma generating apparatus, method for controlling the same and apparatus for treating substrate using the same |
| abstract | The present invention relates to a plasma generating apparatus, a method of controlling the plasma generating apparatus, and a substrate processing apparatus using the plasma generating apparatus. An apparatus for generating plasma according to an embodiment of the present invention includes: an RF power source for providing an RF signal; A plasma chamber into which a gas is injected and converts the gas into plasma; A coil installed in the plasma chamber and adapted to receive an RF signal to induce an electromagnetic field in the plasma chamber; A capacitive element connected to a ground terminal of the coil; And a controller for adjusting a ratio between the impedance of the coil and the impedance of the capacitive element. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170123740-A |
| priorityDate | 2013-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.