| abstract |
An object of the present invention is to provide a composition for forming a liquid immersion upper layer film, which exhibits high water repellency and excellent peel resistance. The solution of this invention is a composition for liquid immersion upper layer film containing the polymer component containing the polymer (a) which has a structural unit (I) represented by [A] following General formula (1), and [B] solvent. . In formula (1), R 1 is a carboxyl group or a group represented by formula (2). X is a single bond, a C1-C20 divalent hydrocarbon group, or a C1-C20 divalent fluorinated hydrocarbon group. R < 2> is -CO-, -COO-,-between C1-C20 (n + 1) valent hydrocarbon groups, C1-C20 (n + 1) valent fluorinated hydrocarbon groups, or carbon-carbon of these groups is a group containing at least one member selected from the group consisting of - O-, -NR'-, -CS-, -S- , -SO- and -SO 2. R 3 is a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms. |