http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140032012-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-4973 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32467 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2008-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef86f5c96483a8d2581aae3b4058e0c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65fd983793de83404fb384d54a27a25f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12f80a1f3151c441f718384c7aef5040 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44beb4e9bb8320caa3e0e6985c7dfe19 |
| publicationDate | 2014-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140032012-A |
| titleOfInvention | Extended Yttrium Oxide Life as Plasma Chamber Material |
| abstract | Two methods of extending the lifetime of yttria as a plasma chamber material are provided. A first method comprises fabricating a three-layer component of a plasma processing chamber by co-sintering a two-layer green body, wherein the first layer comprises ceramic particles and the second layer comprises yttrium oxide particles. The two layers are in close contact during the sintering process. In a preferred embodiment, the three layer component comprises a yttrium oxide outer layer, a YAG interlayer and a second alumina outer layer. Optionally, the disks are pressed together during the sintering process. The three-layer component results in very low porosity. Preferably, none of the yttrium oxide outer layer, the YAG intermediate layer and the alumina second outer layer has a porosity of less than 3%. The second method comprises applying a liquid anoxic sealant having a room temperature viscosity of less than 50 cP to the component by brushing the sealant on all yttrium oxide surfaces of the component, wet cleaning the component, 2 environment for at least < RTI ID = 0.0 > 150 C < / RTI > for at least 2 hours and applying the second sealant coating to the cured substrate by repeating the procedure used to apply the first coating. |
| priorityDate | 2007-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.