| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a162b65402a9a79580e3ae31dcbf3fa |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65H23-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65H20-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
| filingDate |
2012-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f105f4cc2be1880b2b95768953491087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3d7e59b2885ee735212045db2c46445 |
| publicationDate |
2014-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140023324-A |
| titleOfInvention |
Winding film forming device |
| abstract |
The winding film forming apparatus 1 of the present invention comprises a first vacuum chamber 21 into which a first precursor gas is introduced, a second vacuum chamber 22 into which a second precursor gas is introduced, and a first precursor and a second precursor. The 3rd vacuum chamber 23 into which the purge gas used for discharge | emission is introduce | transduced, and the rollable base material 15 are put into the 1st vacuum chamber 21, the 2nd vacuum chamber 22, and the 3rd vacuum chamber 23 A conveyance mechanism 41a, 41b which has a holding part which hold | maintains the both ends of the width direction of the base material 15 with a conveyance box is provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180032280-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101879297-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180070074-A |
| priorityDate |
2011-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |