| abstract |
A movable symmetric chamber liner in a plasma reaction chamber for protecting a plasma reaction chamber, improving plasma density and uniformity, and reducing process gas consumption, the chamber liner having a cylindrical wall, a bottom having a plurality of openings. Wall, convex inner rim with embedded heater, heater contacts, and RF ground return contacts. The chamber liner is moved by actuators between an upper position where substrates can be conveyed into and out of the chamber and a lower position where the substrate is processed within the chamber. Actuators also provide electrical connections to heaters and RF ground return contacts. |