| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5351c62aee4203f2be2944f21a6def2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2012-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1b26a5b2b1a18edbdf2787af39d4140
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8c1797442d70b5e5eebc4dcb5c3a245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_433bd600e71c12f9ddfe6d925f240ada |
| publicationDate |
2013-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20130106181-A |
| titleOfInvention |
Composition for oxide thin film, manufacturing method of liquid process oxide thin film using same, electronic device and thin film transistor using same |
| abstract |
Electronic device and thin film exhibiting excellent electrical properties, including a method for producing a crystalline oxide semiconductor thin film at a low temperature of 350 ℃ or less without undergoing a high temperature heat treatment process of more than 500 ℃ required for the production of liquid-based oxide semiconductor thin film Transistors are provided. The crystalline oxide thin film may be formed at a low temperature through pressure heat treatment using a gas in a container at a low temperature of 350 ° C. or lower. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180050971-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210074487-A |
| priorityDate |
2012-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |