| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_78654de3e25c779ca6cd0e5eb7ba4ca7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00619 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2012-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0c0166c08240f5234273fa793865cde
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55de6c820b6c837a2f7e5ca35dc5f84d |
| publicationDate |
2013-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20130103149-A |
| titleOfInvention |
Plasma processing method and substrate processing apparatus |
| abstract |
The present invention provides a plasma processing method and a substrate processing apparatus. The plasma processing method comprises the steps of: mounting at least one first plasma sources and at least one second plasma sources in a chamber, providing a first gas to the first plasma sources, and providing a first gas to the second plasma sources. Providing a second gas different from the gas, applying power to the first plasma sources to form a first plasma, applying power to the second plasma sources to form a second plasma, and a first Processing the substrate disposed within the chamber using the plasma and the second plasma. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170093127-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190065428-A |
| priorityDate |
2012-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |