http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130087360-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa0f2776bcc27d5099aa97f3212e1681 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-172 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-718 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-389 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-384 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-03 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate | 2012-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03a7e73307d69f3db1c15ea60d84f8cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4769b85d7ce611cf6a3cde717bb86e8e |
| publicationDate | 2013-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130087360-A |
| titleOfInvention | Laser processing equipment |
| abstract | Provided is a laser processing apparatus capable of efficiently forming a laser processing hole from a first member to a second member in a workpiece to which a first member formed by a first material and a second member formed by a second material are connected. . A laser processing apparatus, comprising: a plasma detecting means for detecting a wavelength of a plasma generated by irradiating a workpiece with a laser beam from a laser beam irradiation means, and a controller for controlling the laser light irradiation means based on a detection signal from the plasma detection means. It is included. The plasma detection means includes a bandpass filter for passing only the wavelength of the plasma emitted by the first material, and a photodetector for receiving light passing through the bandpass filter and outputting a light intensity signal to the controller. When performing the laser processing, the controller detects the amplitude of the light intensity based on the light intensity signal output from the photodetector and irradiates a predetermined number of pulsed laser beams from the time point when the amplitude of the light intensity reaches a predetermined value. The laser beam irradiation means is controlled to stop the irradiation of the pulsed laser beam. |
| priorityDate | 2012-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.