| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32135
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2012-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19d7f1df693848404486f4a93d140700
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91e66d3baa29ef2f6e1e7c5da8f232b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17910207fff73c1e0bd849bfdcebaf78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efdcba5409e6467f16de37d22b3aa0ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c88433bc7ffcde6a03be06da8e8fabf9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_619193c7f696e478503914e615a7b286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c98f5a42421a0ed1b3940572632c098 |
| publicationDate |
2013-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20130006314-A |
| titleOfInvention |
Tungsten Film Formation Method |
| abstract |
The present invention provides a method for forming a tungsten film that can eliminate voids and seams in a buried portion without complicated steps. A process of forming a tungsten film by CVD on a substrate having holes to form a buried portion of tungsten in a hole, and supplying ClF 3 gas or F 2 gas as an etching gas in the same processing container and etching the upper portion of the buried portion And a step of forming a tungsten film by CVD in the same processing container with respect to the substrate having the buried portion in which the opening is formed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200034611-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160044004-A |
| priorityDate |
2011-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |