| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-75745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-14181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-75315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-06181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-7598
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-73104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-94 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-58 |
| filingDate |
2011-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_456bd418fbdd5be22dbb654b5fc5b45c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3f51418670cba8fece3a19a56b1624d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0d9706892c72c7d93fed466bb5b6a22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc85d4d2b7bfb6085286226c0496ff73 |
| publicationDate |
2012-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20120137859-A |
| titleOfInvention |
Semiconductor manufacturing apparatus and semiconductor package method using same |
| abstract |
A semiconductor manufacturing apparatus and a semiconductor package method using the same are provided. The semiconductor manufacturing apparatus may include a chuck and a vacuum unit. The chuck may include a body and a porous plate disposed on the body and a buffer pad disposed on the plate and loaded with a plurality of chips and having a higher elasticity than the plate. The vacuum unit may provide a vacuum such that a plurality of chips are adsorbed onto the buffer pad. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190122363-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190093861-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10475764-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190120597-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10964663-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10804132-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190124916-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190122367-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190131312-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190117178-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10950572-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190135858-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11548170-B2 |
| priorityDate |
2011-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |