http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120104945-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2012-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d37d79c1a68354cc81399a4b67b540df |
| publicationDate | 2012-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20120104945-A |
| titleOfInvention | Etching Methods, Etching Apparatus and Computer-readable Storage Media |
| abstract | (Problem) Even in the silicon film in a multilayer structure, it is possible to etch using a resist film or an organic film as a mask, and the etching method which can also etch a silicon film and the silicon oxide film which exists under this silicon film collectively. To provide. (Solution means) An etching method for etching a multilayer structure including a silicon oxide film 2 and a silicon film 3 formed on the silicon oxide film 2, wherein the silicon film 3 and silicon oxide in the multilayer structure are etched. When etching the film 2 , the silicon film 3 and the silicon in the multilayer structure using the resist film 6 or the organic film as an etching mask and using an etching gas containing a CH 2 F 2 gas as the etching gas. The oxide film 2 is collectively etched. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160125896-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220024366-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210104637-A |
| priorityDate | 2011-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.