| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f517051dd4d265e5e931724f45b34ddc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-24 |
| filingDate |
2010-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f27efe57a54f6326f5206a0df2db426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e968e45e42b8a542bdfc50b0188aafe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8f522422bf444362d31b147a0f0a547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c994b64a89e7bec1979715db47681c14 |
| publicationDate |
2012-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20120077676-A |
| titleOfInvention |
Silicon Nitride Etch Composition |
| abstract |
The present invention relates to a wet etching composition of a silicon nitride film. Specifically, in etching a silicon nitride film or a silicon oxide film in a semiconductor process, the etching rate is kept constant without affecting the selectivity of the silicon nitride film and the silicon oxide film even after long-term use. The present invention relates to a wet etching composition comprising a phosphorus compound and an ammonium compound. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200025887-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101380487-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180122141-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9868902-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190040743-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190075670-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10465112-B2 |
| priorityDate |
2010-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |