abstract |
What is disclosed is a water-repellent additive for immersion resists consisting of a fluorine-containing polymer having a repeating unit represented by the following General Formula (1). By adding this water repellent additive to a resist composition, it can control so that it may have high water repellency at the time of exposure, and may improve developer solubility at the time of image development. [Formula 34] [Wherein, R 1 represents a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group, R 2 represents a heat labile protecting group, R 3 represents a fluorine atom or a fluorine-containing alkyl group, and W represents a divalent linking group.] |