| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dfcdab27b778da1d6b6420d581d0c2fe |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2011-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e8d682a8b9f843d49dbe4b4a03f2490
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f4ef09992cf34c3fd03e6e6e113d65e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96bb75b1446dc2293d0992883fafb548
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1f4c4c394dcd7d274421b3a14b48820 |
| publicationDate |
2011-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20110132288-A |
| titleOfInvention |
Patterned inorganic layer, patterning composition based on radiation and method thereof |
| abstract |
The stabilized precursor solution can be used to form the radioactive inorganic coating material. Precursor solutions generally comprise metal suboxide cations, epoxide-based ligands and polyatomic anions. The precursor solution may be designed to obtain a precursor solution of high stability level. The resulting coating material may be designed to pattern with selected radiation such as ultraviolet light, x-ray radiation or electron beam radiation. Since the radiation patterned coating material can have a high contrast with respect to the material properties, the phenomenon of latent image can be successfully formed to form a line having a very low linewidth roughness and an adjacent structure having a very small pitch. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11599022-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190112845-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160136399-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200143524-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10782610-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11693312-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9520289-B2 |
| priorityDate |
2010-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |