| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C275-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-8412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2010-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ac176c466b1c59856c25456c2d1ac9e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0db0e60d0ed73a2d552bc4a6e2ceb077 |
| publicationDate |
2011-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20110120918-A |
| titleOfInvention |
Curable composition for transfer materials and (meth) acryloyl group-containing urea compound |
| abstract |
The present invention provides a curable composition for transfer materials suitable for the nanoimprint method which is very good in transferability by the nanoimprint method, has high selectivity of dry etching rates in argon gas and oxygen gas, and can form fine patterns at high throughput. to provide. The curable composition for transfer materials of the present invention is characterized by containing at least one skeleton selected from the group consisting of the following formulas (1) to (3) and a compound (A) having a (meth) acryloyl group. <Formula 1> <Formula 2> <Formula 3> |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190045071-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190045072-A |
| priorityDate |
2009-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |