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publicationDate 2011-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20110105148-A
titleOfInvention Metal wiring etchant and metal wiring formation method using the same
abstract Provide a metallization etchant. The metal wiring etching solution according to an embodiment of the present invention includes ammonium persulfate, an organic acid, an ammonium salt, a fluorine-containing compound, a glycol compound, and an azole compound.
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