http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110030478-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
filingDate 2009-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b138e2e18ee2f725d9edff3a2a27f98
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb3cc8c0232af7d6fba1fdf32fdc906a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72bd85bb533c902ad8f2ba6f22166e8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_851c6c8ab8ac08f4564bfc47ed734574
publicationDate 2011-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20110030478-A
titleOfInvention Stable High Speed Silicon Slurry
abstract The present invention provides a chemical mechanical polishing composition comprising wet processed silica, a stabilizer compound, a potassium salt, a secondary amine compound and water. The present invention also provides a method of polishing a substrate with the polishing composition.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180069773-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170017877-A
priorityDate 2008-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6380
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419587902
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID516893
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415863827
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID199517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16124
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484094
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422600225
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526944
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4182636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID73727
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66644
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411029050
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID96917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583152
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419514938
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415820888
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74506
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23696331
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419563072
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2734166
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID494065
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419563067
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413371166
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449956432
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454667199
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16028
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415754548
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID164912
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448400546
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74590
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419540251
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419566723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450647129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID33993
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508435
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416155675
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425073608
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448020525
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8197
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426020952
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408184029
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415978956
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9559
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61973
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID643544
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8897
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450411023
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID174076
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579414
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID357594
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66137
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID56841936
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415755945
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4837
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419576560
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456988458
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID173754
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4989215
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82044
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452919128
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID121686
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22481611
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449533595
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450981065
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID120512
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415754150
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10560336
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425334797
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3305
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415873769
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416052906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415747180
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2734160
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451829787
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415873771
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451203623
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID168078
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID468172510
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15162239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17249
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546724
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID199509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544560
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13597
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415756512
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426160712
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2734164
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447909615
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452456730
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546884
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2734162
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70672
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11430
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75312
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70700175
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75118

Total number of triples: 127.