| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32681f1832d227fe8df23d12a37f67a8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac700cbf3bda8eeb00cf1515a60a3ae2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7502fe6947ffe3e095c9ab84ed48cac0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5efb58c834aaa168b3f02c8032d304c1 |
| publicationDate |
2011-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20110020295-A |
| titleOfInvention |
Corrosion resistant member and electrostatic chuck |
| abstract |
In one embodiment of the present invention, the corrosion resistance comprises a ceramic member containing yttrium oxide as a main component, containing an element of cerium, and obtained by firing in a non-oxidizing atmosphere. By setting it as a corrosion-resistant member, it becomes possible to provide the corrosion-resistant member which consists of a ceramic member which has high corrosion resistance and low volume resistivity. |
| priorityDate |
2008-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |