| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2008-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ccf161ef35b336966cff4013963090b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02934cac50cc9bbe1988c1cf760bff18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1454918d2fdd49189591db1afdc9d544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9801226396a7d3f4e927e16ad6250c8 |
| publicationDate |
2010-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100080070-A |
| titleOfInvention |
CPM slurry composition and polishing method using the same |
| abstract |
The present invention comprises the steps of (1) suspending cerium oxide particles in ultrapure water; (2) adjusting the pH of the cerium oxide suspension to 6-11 using a pH adjuster; (3) mixing and dispersing a dispersant in the pH-controlled cerium oxide suspension; (4) mixing the cationic surfactant and the anionic polymer with ultrapure water to prepare an additive solution; And (5) mixing the additive solution with the cerium oxide dispersion. The CMP slurry composition prepared by the method of the present invention exhibits high polishing amount and high flatness. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160009150-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190063989-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101389828-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105143390-B |
| priorityDate |
2008-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |